About: Abstract Electrochemical discharge machining (ECDM) is an efficient micro-machining technique for fabricating hard to machine materials such as glass, alumina, zirconia, etc. Glass based substrates have many applications in the field of MEMS and microfluidic systems. The tool-substrate gap is one of the important process parameters which affects ECD machining characteristics such as micro-feature overcut, width, depth, etc. The reported work investigates the effect of the tool-substrate gap on the ECD machining performance with NaOH and KOH electrolytes. A tapered tool with 130 µm average tip size was used to create blind micro-holes in glass substrate with varying tool-substrate gap and machining time. Numerical and experimental results showed a similar decreasing trend of the depth of blind holes as the tool-substrate gap increases. Higher overcut was observed in the case of a tool-substrate gap of 20 µm in the NaOH electrolyte and 10 µm in the KOH electrolyte. The maximum tool-substrate gap up to which machining happened was observed to be 60 µm and 30 µm in the case of the NaOH and KOH electrolytes, respectively. Tool wear was found to be higher when the tool was in physical contact and when the NaOH electrolyte was used for a machining duration of 60s.   Goto Sponge  NotDistinct  Permalink

An Entity of Type : fabio:Abstract, within Data Space : covidontheweb.inria.fr associated with source document(s)

AttributesValues
type
value
  • Abstract Electrochemical discharge machining (ECDM) is an efficient micro-machining technique for fabricating hard to machine materials such as glass, alumina, zirconia, etc. Glass based substrates have many applications in the field of MEMS and microfluidic systems. The tool-substrate gap is one of the important process parameters which affects ECD machining characteristics such as micro-feature overcut, width, depth, etc. The reported work investigates the effect of the tool-substrate gap on the ECD machining performance with NaOH and KOH electrolytes. A tapered tool with 130 µm average tip size was used to create blind micro-holes in glass substrate with varying tool-substrate gap and machining time. Numerical and experimental results showed a similar decreasing trend of the depth of blind holes as the tool-substrate gap increases. Higher overcut was observed in the case of a tool-substrate gap of 20 µm in the NaOH electrolyte and 10 µm in the KOH electrolyte. The maximum tool-substrate gap up to which machining happened was observed to be 60 µm and 30 µm in the case of the NaOH and KOH electrolytes, respectively. Tool wear was found to be higher when the tool was in physical contact and when the NaOH electrolyte was used for a machining duration of 60s.
Subject
  • Physical chemistry
  • Ceramic glazes
  • Zoo Entertainment (record label) artists
part of
is abstract of
is hasSource of
Faceted Search & Find service v1.13.91 as of Mar 24 2020


Alternative Linked Data Documents: Sponger | ODE     Content Formats:       RDF       ODATA       Microdata      About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data]
OpenLink Virtuoso version 07.20.3229 as of Jul 10 2020, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (94 GB total memory)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software